Process Integration for active polysilicon resonant microstructures
نویسندگان
چکیده
منابع مشابه
Laterally Driven Polysilicon Resonant Microstructures
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ژورنال
عنوان ژورنال: Sensors and Actuators
سال: 1989
ISSN: 0250-6874
DOI: 10.1016/0250-6874(89)87112-4